Technology for Micro- and Nanostructures
Micro- and Nanotechnology
This course on the Technology for Micro- and Nanostructures
provides an advanced understanding of the technology
for fabricating structures with micron- and nanometer-scale dimensions.
At the beginning of the course, the basic technological processes for
lithography and pattern transfer techniques are
discussed. As applications of these technologies, fabrication processes
are presented like CMOS and III-V technology, micromechanics, magnetic
thin-film heads, flat-panel displays, micro optics, x-ray optics and
quantum-effect electronic devices.
The lectures are accompanied by exercises, where important original publications
will be discussed.
Lecture Material (for Students of the Course only)
Literature:
- Marc J. Madou
- Fundamentals of Microfabrication, 2nd edition
CRC Press, Boca Raton 2002.
- Henry I. Smith:
- Submicron- and nanometer-structures technology, 2nd edition
NanoStructures Press, 437 Peakham Road, Sudbury, MA 01776, USA, 1994.
- L.F. Thompson, C.G. Willson, and M.J. Bowden:
- Introduction to Microlithography, 2nd edition
ACS Professional Reference Book, American Chemical Society, 1994.
- Wolfgang Menz und Jürgen Mohr:
- Mikrosystemtechnik für Ingenieure, 2. Auflage
Wiley VCH, Weinheim 1997.
- Stephanus Büttgenbach:
- Mikromechanik - Einführung in Technologie und Anwendungen, 2. Auflage
Teubner Verlag, Stuttgart 1994.
Teaching activities.
Last Update on September 25, 2007
by Peter Unger
(e-mail: peter.unger@uni-ulm.de)