Technology for Micro- and Nanostructures
Micro- and Nanotechnology

This course on the Technology for Micro- and Nanostructures provides an advanced understanding of the technology for fabricating structures with micron- and nanometer-scale dimensions. At the beginning of the course, the basic technological processes for lithography and pattern transfer techniques are discussed. As applications of these technologies, fabrication processes are presented like CMOS and III-V technology, micromechanics, magnetic thin-film heads, flat-panel displays, micro optics, x-ray optics and quantum-effect electronic devices. The lectures are accompanied by exercises, where important original publications will be discussed.

Lecture Material (for Students of the Course only)


Marc J. Madou
Fundamentals of Microfabrication, 2nd edition
CRC Press, Boca Raton 2002.
Henry I. Smith:
Submicron- and nanometer-structures technology, 2nd edition
NanoStructures Press, 437 Peakham Road, Sudbury, MA 01776, USA, 1994.
L.F. Thompson, C.G. Willson, and M.J. Bowden:
Introduction to Microlithography, 2nd edition
ACS Professional Reference Book, American Chemical Society, 1994.
Wolfgang Menz und Jürgen Mohr:
Mikrosystemtechnik für Ingenieure, 2. Auflage
Wiley VCH, Weinheim 1997.
Stephanus Büttgenbach:
Mikromechanik - Einführung in Technologie und Anwendungen, 2. Auflage
Teubner Verlag, Stuttgart 1994.

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Last Update on September 25, 2007
by Peter Unger (e-mail: